Miniaturized mass flow meters / controllers

Bronkhorst has developed a compact solution for measuring and regulating gas flow or pressure: the sensors of the IQ+FLOW® and IQ+PRESSURE® devices are based on MEMS technology. They are miniature flow and pressure regulators that are halved in size. They are ideal for OEM equipment manufacturers looking for small footprint systems. Bronkhorst also offers the possibility of combining different modules on a compact manifold. The IQ+FLOW® concept offers modules with the following functions: • Flow measurement; typical flow ranges from 20 mln/min to 2 ln/min (full scale value) • Pressure measurement; typical pressure ranges in the 100 psi range • Flow or pressure control valve • 3-way valve • Shut-off valve • Strainer • Mixing chamber Combination of these modules can be mounted on a compact, in-line manifold or at the request of the customer after study. In addition, it is possible to have an aluminum or steel manifold, with female inlet/outlet ports which could be suitable for both gases and liquids. There are an infinite number of possible solutions, we strongly recommend that you contact us to discuss your application.